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Defect analysis and alignment quantification of line arrays prepared by directed self-assembly of a block copolymer

机译：通过嵌段共聚物的定向自组装制备的线阵列的缺陷分析和排列定量

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摘要

Trabajo presentado al XXVIII Metrology, Inspection, and Process Control for Microlithography, celebrado en California (US) en 2014.

机译：该论文于2014年在美国加利福尼亚州举行的第二十八届微光刻技术的计量学，检验和过程控制上发表。

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Simao, Claudia; Tuchapsky, D.; Amann, A.; Morris, Michael A.; Sotomayor Torres, C. M.;
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年度 2016
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原文格式 PDF
正文语种 eng
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专利

1. A Hybrid Chemo-/Grapho-Epitaxial Alignment Strategy for Defect Reduction in Sub-10 nm Directed Self-Assembly of Silicon Containing Block Copolymers [J] . Blachut Gregory, Sirard Stephen M., Maher Michael J., Chemistry of Materials: A Publication of the American Chemistry Society . 2016,第24期

机译：含硅嵌段共聚物在低于10 nm的定向自组装中减少缺陷的化学/图形-外延混合混合排列策略
2. A Hybrid Chemo-/Grapho-Epitaxial Alignment Strategy for Defect Reduction in Sub-10 nm Directed Self-Assembly of Silicon Containing Block Copolymers [J] . Blachut Gregory, Sirard Stephen M., Maher Michael J., Chemistry of Materials: A Publication of the American Chemistry Society . 2016,第24期

机译：含硅嵌段共聚物在低于10 nm的定向自组装中减少缺陷的化学/图形-外延混合混合排列策略
3. Defects in the Self-Assembly of Block Copolymers and Their Relevance for Directed Self-Assembly [J] . Li Weihua, Mueller Marcus Annual review of chemical and biomolecular engineering . 2015,第Null期

机译：嵌段共聚物自组装的缺陷及其与定向自组装的相关性
4. Defect Analysis and Alignment Quantification of Line Arrays Prepared by Directed Self-assembly of a Block Copolymer [C] . C. Simao, D. Tuchapsky, W. Khunsin, Conference on metrology, inspection, and process control for microlithography . 2014

机译：嵌段共聚物定向自组装制备线阵列的缺陷分析和比对定量
5. Origin of defects in directed self-assembly of block copolymers using feature multiplication [D] . Rincon Delgadillo, Paulina Alejandra 2014

机译：使用特征乘法的嵌段共聚物定向自组装缺陷的根源
6. Controlled ATRP Synthesis of Novel Linear-Dendritic Block Copolymers and Their Directed Self-Assembly in Breath Figure Arrays [O] . Xin Liu, Tina Monzavi, Ivan Gitsov 2019

机译：新型线性-树枝状嵌段共聚物的受控ATRP合成及其在呼吸图形阵列中的定向自组装
7. Directed self-assembly of PS-b-PMMA block copolymer using HSQ lines for translational alignment [O] . Dipu Borah, Sozaraj Rassapa, Matthew T. Shaw, 2013

机译：PS-B-PMMA嵌段共聚物的定向自组装使用HSQ线进行翻译对准

Defect analysis and alignment quantification of line arrays prepared by directed self-assembly of a block copolymer

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